| 摘要 |
PURPOSE:To provide the wavelength demultiplexing photodetector which has a function for photodetecting light beams having respective wavelengths by demultiplexing light transmitted on a frequency multiplex basis and a function for finely adjusting light wavelengths matching respective photodetectors and is monolithically integrated. CONSTITUTION:Electrodes 17 and 18 are provided on a slab waveguide 13 and the reverse surface of a substrate 1, a voltage can be applied to the slab waveguide 13, and an arcuate vertical diffraction grating 12 is formed on one end surface of the slab waveguide while plural photodetection side waveguides 14 are provided on the other end surface of the slab waveguide 13; and the photodetectors 15 are provided at end parts of the photodetection-side waveguides 14 or directly on the other end surface of the slab waveguide, and the groove direction of the diffraction grating 12 is perpendicular to the substrate of the slab waveguide 13. Further, the waveguide 1 and photodetectors, or mutual photodetectors are electrically separated by an etching groove or the butt joining of an insulating layer. |
