摘要 |
PURPOSE:To minimize bending stress by winding up a superconducting wire including an oxide superconducting thin film formed thereon on a wind-up reel in a chamber of a CVD apparatus, and forming a coil by simultaneously winding up a stabilizing agent tape and an insulating tape upon the winding of the reel. CONSTITUTION:The tip end of a base material tape 5 is wound around a wind-up reel 4 disposed in a chamber 2, and a stabilizing material tape 7, an insulating tape 8, and a low melting point metal tape 9 are wound around the same. The inside of the chamber 2 is brought into an atmosphere fitted to a CVD, and the base material tape 5 is started to be heated by a heater 13. The wind-up reel is rotated to scatter oxide superconductor fine particles 14 from an evaporation part 1 for film formation on the base material tape 5. A superconducting tape 6 on which an oxide superconducting thin film is formed is wound around the wind-up reel 4 together with the stabilizing material tape 7, the insulating tape 8, and the low melting point metal tape 9. This provides a superconducting coil 15, and a high performance superconducting coil is ensured. |