| 摘要 |
The transducer comprises a profile- etched metallic diaphragm (7) the peripheral zone (6) of which is left unetched for mounting the diaphragm on an Al2O3 base plate (1) in an air-tight and pressure-tight manner; and a thin metallic film (2) applied to the adjacent surface of the base plate, the diaphragm (7) and the metallic film (2) constituting a capacitor which varies with the separation between the diaphragm and the metallic film and hence with ambient pressure. The capacitor determines the frequency of an oscillator 13. <IMAGE> |
