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发明名称
THIN FILM SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05102454(A)
申请公布日期
1993.04.23
申请号
JP19910281918
申请日期
1991.10.03
申请人
CANON INC
发明人
TANAKA ICHIRO;MIZUTANI HIDEMASA
分类号
H01L27/146;H01L21/336;H01L29/786
主分类号
H01L27/146
代理机构
代理人
主权项
地址
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