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发明名称
SEMICONDUCTOR PROCESSOR
摘要
申请公布号
JPH05102051(A)
申请公布日期
1993.04.23
申请号
JP19910292417
申请日期
1991.10.11
申请人
MITSUBISHI ELECTRIC CORP
发明人
OCHI SEIJI
分类号
C30B19/06;H01L21/208
主分类号
C30B19/06
代理机构
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