MANUFACTURE OF THIN-FILM TRANSISTOR,申请号JP19910258997-传众专利搜索

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发明名称	MANUFACTURE OF THIN-FILM TRANSISTOR
摘要
申请公布号	JPH05102186(A)	申请公布日期	1993.04.23
申请号	JP19910258997	申请日期	1991.10.07
申请人	NEC CORP	发明人	SEKI YUKO;KANEKO SETSUO
分类号	H01L21/20;H01L21/205;H01L21/285;H01L21/316;H01L21/336;H01L27/12;H01L29/78;H01L29/786	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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