| 摘要 |
PURPOSE:To reduce the load of linear motors and move a wire bonder in the X, Y directions with high precision at a high speed by providing an X table device, a Y table device, and the wire bonder. CONSTITUTION:Linear motors 4, 14 are driven to slide a wire bonder 31 in the X, Y directions, and the bonding work such as wire bonding or bump formation is performed. Since a Y table device 11 is not installed on an X table device 1 but installed in parallel on its side, the load of the Y table device 11 is not applied to the X table device 1, and the wire bonder 31 can be smoothly moved in the X, Y directions at a high speed. A bonder such as the wire bonder 31 is smoothly slid in the X, Y directions at a high speed, and the bonding work such as wire bonding can be performed. |
