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发明名称
PALLET TYPE TEST BOARD DEVICE AND IC TEST METHOD
摘要
申请公布号
JPH05102265(A)
申请公布日期
1993.04.23
申请号
JP19910290774
申请日期
1991.10.07
申请人
MITSUBISHI ELECTRIC CORP
发明人
SAKAI IWAO
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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