Fluorine-containing cyclotrisiloxane and process for preparing the same.

摘要

A fluorine-containing cyclotrisiloxane having the following general formula: <CHEM> wherein R<1> to R5 are each an alkyl group of from 1 to 6 carbon atoms, m is an integer from 2 to 8, and n is an integer from 1 to 7. The compound is of use as a material for preparation or modification of various silicone compounds, and also as a surface-treating agent for silica, an adhesion improver for resists, and a water- or oil-repellency agent.