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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0594998(A)
申请公布日期
1993.04.16
申请号
JP19910214913
申请日期
1991.08.27
申请人
SUMITOMO METAL IND LTD
发明人
OKUMURA NOBUO
分类号
H01L21/336;H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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