发明名称 LIGHT RESISTANT PELLICLE
摘要 PURPOSE:To improve the film strength, moisture resistance and light fastness of the above pellicle by consisting the pellicle of a specific carbonated cellulose deriv. CONSTITUTION:A transparent thin film substantially consisting of the carbonated cellulose deriv. expressed by formula I is used. In the formula, a, b and c are a>=0, b>=0, c>0 and are the numbers satisfying a+b+c=3; R denotes formula II (where R'' is 1 to 12C alkyl group or cycloalkyl group) or -NO2 group; R' denotes 1 to 12C alkyl group, cycloalkyl group, phenyl group or substd. phenyl group; n denotes the degree of polymn. of the cellulose deriv. and denotes a number from 10 to 3000. Further, >=1 layers of antireflection layers provided with low-refractive index antireflection layers consisting of a fluorine polymer having a cyclic structure in the main chain and <=1.0g/d1 reduction viscosity at 23 deg.C of a perfluorotributyl amine soln. of 1.5g/d1 concn. are formed on at least one surface of the transparent thin film.
申请公布号 JPH0594006(A) 申请公布日期 1993.04.16
申请号 JP19910278930 申请日期 1991.10.01
申请人 ASAHI CHEM IND CO LTD 发明人 TAKIGUCHI TERUO;KANEKO YASUSHI
分类号 C08B3/16;C08B7/00;G03F1/62;H01L21/30 主分类号 C08B3/16
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