INSPECTING APPARATUS FOR FOREIGN SUBSTANCE,申请号JP19910278919-传众专利搜索

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发明名称	INSPECTING APPARATUS FOR FOREIGN SUBSTANCE
摘要
申请公布号	JPH0593695(A)	申请公布日期	1993.04.16
申请号	JP19910278919	申请日期	1991.10.01
申请人	HITACHI ELECTRON ENG CO LTD;HITACHI LTD	发明人	YANAI TOSHIAKI;NOZOE MARI;IKODA MASAMI;AKIYAMA NOBUYUKI;CHIKAMATSU SHUICHI
分类号	G01B11/24;G01B11/30;G01N21/88;G01N21/94;G01N21/956;H01L21/66	主分类号	G01B11/24
代理机构		代理人
主权项
地址

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