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发明名称
HIGH FREQUENCY ION SOURCE
摘要
申请公布号
JPH0594796(A)
申请公布日期
1993.04.16
申请号
JP19910280490
申请日期
1991.09.30
申请人
NISSIN ELECTRIC CO LTD
发明人
ANDO YASUNORI
分类号
H01J27/16;H01J37/08
主分类号
H01J27/16
代理机构
代理人
主权项
地址
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