| 摘要 |
The generator circuit directly controls a matching network automatically without a separate matching network control circuit. The circuit comprises a RF oscillator (1), two amplifiers (2,3), a progressive and reflective wave power sensor (4) connected between the amplifier (3) and matching network, a RF oscillating voltage controller (5), a RF power and phase sensor (7) for sensing the reflective wave power and its phase from the matching network, an automatic matching network controller (10) for outputting a control signal of the matching network impedence, a matching display (11) for displaying the matching tolerance, and a selector (13) for selecting the automatic or manufal matching control.
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