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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0595088(A)
申请公布日期
1993.04.16
申请号
JP19920057471
申请日期
1992.02.10
申请人
AGENCY OF IND SCIENCE & TECHNOL
发明人
HAYASHI YUTAKA;SUZUKI HIDEKAZU;SEKIKAWA TOSHIHIRO;NAGAI KIYOKO;KAWANAMI HITOSHI
分类号
H01L21/20;H01L21/203;H01L21/8238;H01L27/092;H01L29/78
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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