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发明名称
MEASURING METHOD OF THERMOPHYSICAL VALUE OF THIN FILM
摘要
申请公布号
JPH0593700(A)
申请公布日期
1993.04.16
申请号
JP19910253287
申请日期
1991.10.01
申请人
NEC CORP
发明人
OKUBO SHUICHI;OKUDA SHINICHI
分类号
G01N25/18;G01N27/18;H01L21/66
主分类号
G01N25/18
代理机构
代理人
主权项
地址
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