摘要 |
PURPOSE: To rapidly heat only a film on a substrate to a high temperature without heating the substrate. CONSTITUTION: In a method for selectively heating a film 12 on a substrate 14, the film is allowed to have light absorption characteristics that are different from the absorption characteristics for the substrate and light 10 with the maximum intensity at a wavelength that is essentially absorbed by the film and at the same time cannot be absorbed essentially by the substrate 14 is applied to the sample (obtained by combining the film and the substrate). |