| 摘要 |
PURPOSE:To achieve a high-resolution and high-sensitivity detection by forming a plurality of projection patterns at least for each picture element on a photo- detection panel where a plurality of picture elements are formed on a substrate and then performing crystalline growth of a scintillator on its surface. CONSTITUTION:A two-dimensional photo sensor 300 is formed at a central part of a glass substrate 200 and then a scintillator part 400 which consists of column-shaped crystals of a number of scintillators is formed on it. Then, the columnar crystal of the scintillator 44 is separated for each projection pattern 41 and is subjected to crystalline growth, thus enabling crosstalk to be reduced, obtaining a high resolution, and a high detection efficiency since a surface of the scintillator 44 works as a reflection surface of scintillation light. Furthermore, efficiency can be further improved by providing a reflection film 43. Besides, spreading on a coating film 45 increases protection effect.
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