METHOD AND VERTICAL DEVICE FOR FORMING CVD FILM,申请号JP19910280427-传众专利搜索

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发明名称	METHOD AND VERTICAL DEVICE FOR FORMING CVD FILM
摘要
申请公布号	JPH0593274(A)	申请公布日期	1993.04.16
申请号	JP19910280427	申请日期	1991.09.30
申请人	KOKUSAI ELECTRIC CO LTD	发明人	KADO YUTAKA
分类号	C23C16/44;C23C16/455;H01L21/205;H01L21/31	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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