| 摘要 |
PURPOSE:To easily form a laminated PZT capable of being sufficiently strained at a low voltage with a small number of stages and at a low cost by irradiating PbTiZrO3 and an electrode material with a laser beam to apply an abrasion process. CONSTITUTION:The laser beam from its transmitter 1 is introduced into a vacuum chamber 6 through a mirror 2, mask slit pattern insertion part 3, image forming lens 4, etc., from a quartz window 5 to irradiate a target holder 7. The holder 7 is made rotatable and the PbTiZrO3 and electrode material as the target are set on the holder. The target is abraded by the laser beam to vapor-deposit a thin-film laminated PZT on the opposed plate 8. This PZT thin film is easily obtained at a high rate, the PZT part is sufficiently strained at a low voltage. Meanwhile, a shutter mass having a specified pattern is arranged directly before the plate 8, and an electrode pattern is easily formed. |
