VORRICHTUNG ZUR LOESBAREN BEFESTIGUNG EINES TARGETS ODER TARGETGRUNDKOERPERS AUF DER KATHODENHALTERUNG,申请号DE19914133564-传众专利搜索

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发明名称	VORRICHTUNG ZUR LOESBAREN BEFESTIGUNG EINES TARGETS ODER TARGETGRUNDKOERPERS AUF DER KATHODENHALTERUNG
摘要
申请公布号	DE4133564(A1)	申请公布日期	1993.04.15
申请号	DE19914133564	申请日期	1991.10.10
申请人	LEYBOLD AG, 6450 HANAU, DE	发明人	KUNZ, HANS, 6467 HASSELROTH, DE;SCHUHMACHER, MANFRED, 8755 ALZENAU, DE
分类号	C23C14/34;H01J37/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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