Flow sensor and method of manufacture

摘要

A hot-wire mass air flow sensor includes integral, elongated silicon members with a silicon dioxide coating on which temperature sensitive resistors are deposited. The air flow sensor has an extremely low thermal conductivity material base on which is mounted one or more of the elongate silicon members. This structure maximizes the thermal impedance of the conductive path existing at the ends of the flow sensor resistors and minimizes sensor errors. A method for fabricating the air flow sensor is also provided.