发明名称 |
POSITIVE WORKING PHOTOSENSITIVE COMPOSITION |
摘要 |
A positive working photosensitive composition comprising a polymeric compound insoluble in water but soluble in an aqueous alkaline solution and an aromatic sulfonic acid salt of an onium compound. The positive working photosensitive composition having high sensitivity and being capable of forming high-contrast images.
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申请公布号 |
US5202216(A) |
申请公布日期 |
1993.04.13 |
申请号 |
US19900608801 |
申请日期 |
1990.11.05 |
申请人 |
FUJI PHOTO FILM CO., LTD. |
发明人 |
AOTANI, YOSHIMASA;UMEHARA, AKIRA;YAMAOKA, TSUGUO |
分类号 |
G03F7/039;C07C303/22;C07C309/43;C07C381/12;C07D333/46;C07D335/02;G03F7/004;H01L21/027;H01L21/30 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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