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发明名称
SOLUBILIZATION-INHIBITOR AND POSITIVE RESIST COMPOSITION
摘要
申请公布号
US5202217(A)
申请公布日期
1993.04.13
申请号
US19900562655
申请日期
1990.08.03
申请人
TOSOH CORPORATION
发明人
TODOKO, MASAAKI;TANIGUCHI, TAKASHI;SEITA, TORU;SATO, SHINJI;SHIBATA, KATUYA
分类号
C07C229/12;C07C245/14;C07F7/18;G03F7/004;G03F7/022
主分类号
C07C229/12
代理机构
代理人
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