摘要 |
A magnetometer is prepared by depositing three thin-film SQUID magnetic field detectors upon a substrate. Two of the detectors incorporate stripline SQUID detectors deposited at right angles to each other, to measure the orthogonal components of a magnetic field that lie in the plane of the substrate. The third detector uses a planar loop SQUID detector that measures the component of the magnetic field that is perpendicular to the substrate. The stripline SQUID detectors have thin-film base and counter electrodes separated by an insulating layer which is at least about 1 micrometer thick, and a pair of Josephson junctions extending between the electrodes through the insulating layer.
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