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经营范围
发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0590338(A)
申请公布日期
1993.04.09
申请号
JP19910251377
申请日期
1991.09.30
申请人
HITACHI LTD
发明人
SATO TOSHIHIKO;HAYASHIDA TETSUYA
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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