| 摘要 |
<p>PURPOSE:To improve the operability of a diffusion furnace by automatically delivering a cassette to an external conveyor by a cassette stage of a transferring apparatus, providing a stocker for containing a plurality of cassettes, and always obtaining a preparation of a cassette to be primarily processed before processing. CONSTITUTION:A cassette 1 on a cassette stage 8 is conveyed to a predetermined position of a stocker 9 by a first conveying robot 101. A cassette 1a to be primarily processed contained in a section A of the stocker 9 is conveyed to a section X of a transfer stage 11 by a second conveying robot 12, and a semiconductor wafer 2 is transferred from the cassette 1a to a heat treating board 4 by a transfer unit 13. In the meantime, a cassette 1a to be next primarily processed is similarly conveyed and transferred to the other section Y on the stage 11, and transferred. The similar operation is repeated to end the transfer of the wafers 2 contained in the cassette 1a to be primarily processed and an inspection cassette 1d to the board 4, and the wafers 2 are diffused in a diffusion furnace 6.</p> |
