| 摘要 |
<p>PURPOSE:To prevent the peeling of an active layer due to the vibration of a ferroelectric layer and to improve the durability and reliability by providing a peeling preventive layer at least one place between adjacent members or on the external surface of the outermost member. CONSTITUTION:The peeling preventive layer 5 is provided at least one place between adjacent members among an insulating substrate 1, a 1st electrode 2, the ferroelectric layer 3, and a 2nd electrode 4 or on the surface of the member, positioned on the opposite side from the insulating substrate 1, on the opposite side from the insulating substrate 1. Consequently, the ferroelectric layer 3, etc., is prevented from being peeled owing to the vibration of the ferroelectric layer 3 of the active layer. The active device which has the peeling preventive layer 5 is manufactured by performing a process wherein the 1st electrode 2 is formed on the insulating substrate 1, a process wherein the ferroelectric layer 3 is formed, a process wherein the 2nd electrode is formed, and a process wherein the peeling preventive layer 5 is formed in the order of lamination on the insulating substrate 1, and heating the ferroelectric layer 3 above its Curie point and below its melting point and slowly cooling it.</p> |
