| 摘要 |
PURPOSE:To attain the automatic measurement by scanning an object to be measured with the aid of an intensity modulated light beam while its modulation frequency is changed by matching to the shape of the object to be measured and creating a striped pattern on the object in a short time. CONSTITUTION:In terms of a holographic laser beam scanner, some holograms are disposed and fixed on the circular periphery of a disk, and rotated at a high speed, thereby scanning a laser beam 1. When the pre-optical system of the holographic laser scanner 4 is adjusted so that the scanning beam 1 can converge in the scanning direction and can diverge in the sub-scanning direction on the surface of the object 6, a scope having the length decided as a scan length is uniformly scanned according to the beam width in the sub-scanning direction. At this time the output of the laser 1 is intensity-modulated to create the striped pattern on the surface of the object 6. Moreover by controlling an injection current to the laser 1, fringe having arbitrary phases and amplitudes can be projected, and the fringe with the pitch suitable to the shape of the object 6 can be freely created. |
