发明名称 DETECTING METHOD FOR DEFORMED PART OF LEAD
摘要 PURPOSE:To accurately detect a deformed part such as a projection or defect generated in a lead and a lead terminal, etc. CONSTITUTION:An operator 17 consisting of two wire patterns intersecting orthogonally to each other and of X-shape is used as the operator used when the deformed part such as the defect and the projection at the edge of the lead formed in lengthy shape and that at the terminal part, etc., are detected by pattern recognition. A neighborhood logical operation of reduction or magnification is executed sequentially on each pixel of an original pattern 30 as scanning the original pattern in which the lead is patternized by the operator 17 in a state where the directions of the two wire patterns of the operator 17 can intersect in the longitudinal direction. An output pattern 32 obtained from the final computing result is compared with the original pattern 30, and a deformation pattern 33 and a terminal part pattern 34 can be extracted.
申请公布号 JPH0589223(A) 申请公布日期 1993.04.09
申请号 JP19910276890 申请日期 1991.09.27
申请人 ASAHI OPTICAL CO LTD 发明人 NOHARA KAZUO;OKUYAMA TAKASHI;HIROTA TOSHIHISA
分类号 H01L21/66;G06T1/00 主分类号 H01L21/66
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