APPARATUS FOR CONTINUOUSLY FORMING FUNCTIONAL DEPOSITED FILM

摘要

PURPOSE:To provide a high-productivity apparatus for forming a functional deposited film wherein multiple processes in which pressures adequate to film formation are different from each other can be performed by a device of a series of roll to roll systems. CONSTITUTION:Belt support 107 is passed through multiple film formation chambers 101-103 connected by the gas gates 16 having slit isolation path while being continuously carried in the longitudinal direction so as to continuously form functional deposited film on the belt support 107. The gas gates 106 are fitted with ports for drawing or exhausting an isolating gas. Expansion chamber 117 and multiple throttle pieces 8 making gaps with the belt support 107 are provided on the side of either forward or backward position from the inlet or outlet ports in the longitudinal direction of the belt support 107 in the isolating path.