| 摘要 |
PURPOSE:To control, with high precision, the temperature of exposure atmosphere in the vicinity of a heat generation part like the vicinity of an optical path of SR light, by installing a heat exchanger performing heat exchange between the inside and the outside of an equipment, on the external wall of an aligner. CONSTITUTION:The pressure in a main chamber 101 is controlled to be a specified value by controlling the displacement with a control valve 120. In this state, exposure is performed. At this time, heat exchange is performed between helium in the main chamber 101 and the atmosphere outside the main chamber 101, via a fin 124 fixed to a beam port 111. Thereby at least helium in the optical path of SR light can be managed to be at a temperature equal to the atmosphere outside the main chamber 101 whose temperature is managed to be constant, i.e., 23+ or -0.01 deg.C. |
