| 摘要 |
<p>PURPOSE:To detect the presence or absence, number and arrangement state of a plurality of semiconductor wafers to be arranged at a suitable interval. CONSTITUTION:A plurality of light emitting elements 7 and photodetectors 8 of a transmission light type detecting means are oppositely disposed at symmetrical both sides with respect to the array center of wafers 3, and arranged in a zigzag state along the interval 11 between the wafers 3. A light emission controller 12 for selectively switching one or a plurality of the elements 7 is connected to the element 7, and a photodetecting controller 13 for sensing an optical beam responsive to the switching operation of the elements 7 is connected to the photodetectors 8. A CPU 14 for calculating to compare the signals of the controllers 12, 13 and output a detection display signal is connected to the controllers 12, 13. Thus, the presence or absence, the number and arranging state of the arranged wafers 3 can be detected.</p> |
