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经营范围
发明名称
VAPOR GROWTH METHOD
摘要
申请公布号
JPH0590167(A)
申请公布日期
1993.04.09
申请号
JP19910278238
申请日期
1991.09.30
申请人
TOSHIBA CORP
发明人
OMINE TOSHIMITSU;SATO HIROSUKE
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
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地址
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