| 摘要 |
<p>PURPOSE:To enhance the reliability of the thin-film laminated device without generating peeling, cracking, etc., between a plastic substrate and the device provided thereon. CONSTITUTION:The SiOxNy layer of the plastic substrate for the thin-film laminated device formed with a thin film consist of SiOxNy on at least one surface has such a graded distribution in which (x) is smaller and (y) is larger from the plastic substrate side toward the front surface.</p> |
