发明名称 CHIP TAKING-OUT APPARATUS
摘要 PURPOSE:To provide a chip taking-out apparatus which can decrease the cost of a product and can select the chip by a map method readily. CONSTITUTION:A chip 17a is selectively picked up from a wafer 17, which is mounted on a pressure sensitive adhesive sheet 18, and whose dicing is finished. The chip 17a is delivered to a chip holding device 12. In this chip taking out apparatus 11, a pushing-up needle 22 is provided in the vicinity of the chip holding device 12. A heating means 24 for heating the needle 22 is provided at the needle 22.
申请公布号 JPH0590408(A) 申请公布日期 1993.04.09
申请号 JP19910276260 申请日期 1991.09.30
申请人 SONY CORP 发明人 TAMAKI HITOSHI;ISHIYAMA HIROSHI
分类号 H01L21/52;H01L21/301;H01L21/67;H01L21/68;H01L21/78 主分类号 H01L21/52
代理机构 代理人
主权项
地址