METHOD OF EVALUATING DEEP LEVEL DENSITY DISTRIBUTION IN SEMICONDUCTOR CRYSTAL,申请号JP19910274545-传众专利搜索

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发明名称	METHOD OF EVALUATING DEEP LEVEL DENSITY DISTRIBUTION IN SEMICONDUCTOR CRYSTAL
摘要
申请公布号	JPH0590368(A)	申请公布日期	1993.04.09
申请号	JP19910274545	申请日期	1991.09.26
申请人	SHIN ETSU HANDOTAI CO LTD	发明人	KITAGAWARA YUTAKA;HOSHI RYOJI;TAKENAKA TAKUO
分类号	G01N21/64;H01L21/66	主分类号	G01N21/64
代理机构		代理人
主权项
地址

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