| 摘要 |
PURPOSE:To reduce the packaging area of a passive element and to extremely reduce the total size of a microwave integrated circuit by providing a monolithic type to the passive element consisting of a distribution constant circuit of a microstrip line structure. CONSTITUTION:A microwave integrated circuit consists of a ground electrode 2 formed on the surface of a substrate of a semi-insulated chemical semiconductor of gallium arsenic, etc., a ground electrode 3 formed on the rear surface of the substrate 1, a pierced hole 4 which drilled through the substrate 1 and secures the electric connection between both electrodes 2 and 3, a dielectric film 5 formed on the electrode 2, a wiring electrode 6 formed on the film 5 and forms a passive element like a filter E, etc., and a transmission circuit, etc., and an active element part 7 of an FET, etc., forming an amplifier circuit A1 on the surface of the substrate 1. The electrode 3, the film and the electrode 6 form a microstrip line of a monolithic structure. Therefore the microwave integrated circuit can be miniaturized with application of an MMIC structure that can reduce the thickness of the circuit down to about 1/4000 as long as the characteristic impedance is constant. Then the area occupied by the circuit is extremely reduced. |
