| 摘要 |
<p>PURPOSE:To provide a positioning device of substrate transfer which is provided with a general purpose positioning means of simple and inexpensive constitution to substrates of all configurations. CONSTITUTION:A plurality of long grooves 60b and 60c for fluid emission of air, etc., are provided to cross each other on a cradle 60 whereon a substrate 31 which is transferred by a substrate transfer means is mounted to perform accurate positioning by emitting fluid in all directions.</p> |
