VERFAHREN UND VORRICHTUNG FUER PHOTOLACKVERARBEITUNG.,申请号DE19863687902-传众专利搜索

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发明名称	VERFAHREN UND VORRICHTUNG FUER PHOTOLACKVERARBEITUNG.
摘要
申请公布号	DE3687902(D1)	申请公布日期	1993.04.08
申请号	DE19863687902	申请日期	1986.11.25
申请人	USHIO DENKI, TOKIO/TOKYO, JP	发明人	SUZUKI, SHINJI;ARAI, TESUJI;OHNO, KUNIHARU;UEKI, KAZUYOSHI;MIMURA, YOSHIKI;TANAKA, KAZUYA;SUGIOKA, SHINJI;SUZUKI, HIROKO, YOKOHAMA-SHI KANAGAWA-KEN, JP
分类号	G03F7/40;G03C5/00;G03F7/20;G03F7/38;H01L21/027;H01L21/30;(IPC1-7):G03F7/26	主分类号	G03F7/40
代理机构		代理人
主权项
地址

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