发明名称 Device for introducing reagents into an organometallic vapour phase deposition apparatus.
摘要 <p>The device for introducing reagents into an organometallic vapour phase deposition apparatus consits of a valve body comprising two chambers (C1, C2), each of them being suited to be placed in communication with a way (1) for the introduction of the reagent and being permanently connected with two ways (2, ...) traversed by carrier gas. &lt;IMAGE&gt;</p>
申请公布号 EP0535308(A1) 申请公布日期 1993.04.07
申请号 EP19920109299 申请日期 1992.06.02
申请人 CSELT CENTRO STUDI E LABORATORI TELECOMUNICAZIONI S.P.A. 发明人 BERTONE, DANIELE
分类号 C23C16/455;C30B25/14;(IPC1-7):C23C16/44 主分类号 C23C16/455
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