PRODUCTION OF THIN FILM PATTERN

摘要

PURPOSE:To provide a production method for a thin film pattern having high throughput and needless to join together mask patterns even when using a substrate of large area. CONSTITUTION:In the production method for the thin film pattern by forming and arranging the mask pattern 5 on the thin film 2 after the thin film 2 is provided on the substrate 1 and by removing the exposed part of the thin film 2 by etching to execute patterning of the thin film 2, the organic resin layer 3 is formed by uniformly applying an organic resin on the whole surface of the substrate 1 provided with the thin film 2 and the mask pattern 5 is formed on the thin film 2 by pressing the organic resin layer 3 with the stamper 4 having the same unevenness as the mask pattern 5 and almost the same dimension as the substrate 1.