| 摘要 |
PURPOSE:To intensify laser output by providing a preliminary ionization means which preliminarily ionizes such gas laser medium as that before flowing into a main discharge space formed between main discharge electrodes along the entire length in the longitudinal direction of the main discharge electrode side by electric discharge without using photon. CONSTITUTION:The gas laser medium in a path 12 is circulated by operating a fan 13. When the first switch is closed at this state, high frequency discharge is ignited between a pair of high frequency discharging electrode 21 so as to preliminarily ionize such gas laser medium m1 as that before flowing into a main discharge space 18a between the pair of main discharge electrode 18. The preliminarily ionized gas laser medium m2 flows toward a pair of main discharge electrode 18. When it flows into a pair of main discharge space 18a, a driving signal is outputted to the second switch. As a result, main discharge is ignited between the pair of main discharge electrodes 18 so as to excite the preliminarily ionized gas laser medium m1 and laser beam is generated. |
