| 摘要 |
PURPOSE:To perform automatic focusing in a short time. CONSTITUTION:A stage 72 is driven in the direction of an optical path through a stage driving part 72 until a CPU detects a focusing position based on the image pickup data of an image pickup element for focusing. The reference position 144 of the stage 73 is set slightly below the logical focus position of an objective 140. Position sensors 145 and 146, and 147 are installed at the upper-limit position 141 and lower-limit position 142 of the movement range of the stage 73, and the reference position 144. The stage 73 is moved to the reference position 144 at the time of focusing and moved up at every interval of 100mum, it is decided whether the image pickup data is focusing position or not, and the stage 73 is stopped at the focusing position. |
