VIA-HOLE FORMATION METHOD OF SEMICONDUCTOR DEVICE,申请号JP19910240669-传众专利搜索

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发明名称	VIA-HOLE FORMATION METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH0582482(A)	申请公布日期	1993.04.02
申请号	JP19910240669	申请日期	1991.09.20
申请人	NEC CORP	发明人	AKIMOTO KENJI
分类号	H01L21/28;H01L21/302;H01L21/3065	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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