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发明名称
PRESSURE DETECTING CHIP OF SEMICONDUCTOR PRESSURE DETECTOR
摘要
申请公布号
JPH0582805(A)
申请公布日期
1993.04.02
申请号
JP19910239517
申请日期
1991.09.19
申请人
MITSUBISHI ELECTRIC CORP
发明人
TAKEUCHI TAKANOBU
分类号
G01L9/04;G01L9/00;G01L9/06;H01L29/84
主分类号
G01L9/04
代理机构
代理人
主权项
地址
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