| 摘要 |
<p>PURPOSE:To enable a production management system for semiconductor devices to check whether or not a working order setting is mistaken from a view of the degree of cleanness. CONSTITUTION:This working order setting device is provided with a degree of cleanness registering means 6 which sets degrees of cleanness at every manufacturing device or at every kind of manufacturing devices, working flow setting means 8, verifying section 9 which verifies whether or not set working order meets a rule established on the basis of the rank of a set degree of cleanness, working flow registering means 8 which registers set working order when the verification result of the section 9 is positive, and correction instructing means 10 which instructs correction when the verification result of the section 9 is negative.</p> |
