| 摘要 |
PURPOSE:To apply sufficient floating force onto a conveying table and to enhance travel stability by exciting an appropriate pole or pole unit corresponding to the traveling position of the conveying table upon arrival of the conveying table to a position sensor thereby making it possible to constitute a planar conveying table. CONSTITUTION:When a photosensor Ps11 detects a conveying table 18, current is fed to the pole 12... of a unit U1 which is thereby excited. When the conveying table 18 moves to the right while floating, a sensor Ps12 also detects the conveying table 18 and the poles 12... of both units U1, U2 are excited. When the conveying table 18 moves further to the right R to bring about a state where the sensor Ps12), Ps22 are not detecting the conveying table 18 but the sensor PS21 is detecting the conveying table, pole 12... only of the unit U2 is excited. Consequently, the conveying table levitates stably and travels along a moving fields. |
