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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT ELEMENT AND WAFER TEST INSPECTION
摘要
申请公布号
JPH0582605(A)
申请公布日期
1993.04.02
申请号
JP19910274674
申请日期
1991.09.24
申请人
MITSUBISHI ELECTRIC CORP
发明人
UEDA KIYOTOSHI
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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