| 摘要 |
PURPOSE:To provide an excimer laser oscillator in which the tilt of mirror holder can be easily adjusted without eliminating the sealing property. CONSTITUTION:This device is provided with a block 3 fixed on an oscillator body 1, a mirror holder 6 that has a spherical protruding section 6a engaged with a spherical recessed section 3a of the block 3 with a seal member 5 in between, and a tilt adjusting screw mechanism 7 to fit the holder 6 to the block 3. The mechanism 7 is provided with three adjusting screws 17 and 18 arranged at equal intervals in the circumferential direction, and the screws 17 and 18 are respectively attached with a pushing spring 21 to press in the holder to the block 3 side and a return spring 22 to detach the holder 6 from the block 3 side, alternately. |
